JPS6216501B2 - - Google Patents

Info

Publication number
JPS6216501B2
JPS6216501B2 JP54082458A JP8245879A JPS6216501B2 JP S6216501 B2 JPS6216501 B2 JP S6216501B2 JP 54082458 A JP54082458 A JP 54082458A JP 8245879 A JP8245879 A JP 8245879A JP S6216501 B2 JPS6216501 B2 JP S6216501B2
Authority
JP
Japan
Prior art keywords
filament
wehnelt electrode
thermal expansion
support member
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54082458A
Other languages
English (en)
Japanese (ja)
Other versions
JPS567339A (en
Inventor
Takeshi Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP8245879A priority Critical patent/JPS567339A/ja
Publication of JPS567339A publication Critical patent/JPS567339A/ja
Publication of JPS6216501B2 publication Critical patent/JPS6216501B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/07—Eliminating deleterious effects due to thermal effects or electric or magnetic fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP8245879A 1979-06-29 1979-06-29 Electron gun Granted JPS567339A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8245879A JPS567339A (en) 1979-06-29 1979-06-29 Electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8245879A JPS567339A (en) 1979-06-29 1979-06-29 Electron gun

Publications (2)

Publication Number Publication Date
JPS567339A JPS567339A (en) 1981-01-26
JPS6216501B2 true JPS6216501B2 (en]) 1987-04-13

Family

ID=13775061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8245879A Granted JPS567339A (en) 1979-06-29 1979-06-29 Electron gun

Country Status (1)

Country Link
JP (1) JPS567339A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016027575A1 (ja) * 2014-08-20 2016-02-25 株式会社島津製作所 電子源およびそれを備えたｘ線管

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53137660A (en) * 1977-05-09 1978-12-01 Hitachi Ltd Electron gun

Also Published As

Publication number Publication date
JPS567339A (en) 1981-01-26

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